Variability-aware double-patterning layout optimization for analog circuits
spiedigitallibrary.org
Variability-aware double-patterning layout optimization for analog circuits
The semiconductor industry has adopted multi-patterning techniques to manage the delay in the extreme ultraviolet lithography technology. During the design process of double-patterning lithography layout masks, two polygons are assigned to different masks if their spacing is less than the minimum printable spacing. With these additional design ...
Mar 20, 2018
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11K views · 217 reactions | Have you seen our video on multiple patterning? Several clever multiple patterning strategies have been developed to create tiny, densely packed features on chips. Check out our video to learn how the techniques work! | Lam Research Corporation | Facebook
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